Single Point System
Our current in-line scatterometer uses 45° off-axis parabolic mirrors which allows us to have an angular scan of the angle of incidence of ~50°. The single-point system can be integrated with nano-imprint and other R2R real-time fabrication techniques. The goal is to improve quality control and monitor real-time high-speed nano fabrication processes. The angular range can be improved (up to 79°) by varying the focal length and the curvature of the parabolic mirrors.
Multi-Point System
The multi-point system will use a pattern structure to create diffraction orders. The diffraction orders will be refocused by using a planoconvex lens that will focus all diffraction orders at the resonator. The resonant scanner movement will be perpendicular from the direction of the diffraction orders to ensure a ray of scanning points at the moving web. The cylindrical mirrors will focus the collimated beams to the moving web and further obtain by individual detectors across the web.